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Wafer Sizes and Types
2" to 150mm for all processes
200mm capabilities in development
Si, InP, Li Niobate, Li Titanate, quartz, glass, ceramic
200mm & 300mm capabilities in development
Processes Include
Litho
Wet etch and clean
Dry etch
Vacuum deposition processes
Plating
Some Alta Equipment
Quintel 7000 aligner with backside capabilities
Ultratech 2700 steppers
MRC metal sputtering systems
Deposition and etch cluster tool
SEM, EDX
Alta Fab Minimum Feature Sizes
1.1um
0.9 um in development
Outsource Alliance Capabilities
200mm AND 300mm full fabs
130nm minimum features
100nm minimum features in development
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